Publication: MEMS fourier transform IR spectrometer
Program
KU Authors
Co-Authors
Sandner, Thilo
Luettjohann, Stephan
Advisor
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Abstract
A comb-actuated MEMS lamellar grating FTIR spectrometer with maximum OPD of 652μm and clear aperture area of 9.6mm2 is developed. Laser and IR interferograms in 2.5-16μm wavelength band are acquired at ambient pressure.
Source:
Publisher:
IEEE
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Keywords
Electrical electronics engineering